P. Montgomery , J. Fillard
SPIE Interferometry: Techniques and Analysis , Volume 1755 , page 12-23 - 1993
International conference with proceedings
Peak fringe scanning microscopy (PFSM): submicron 3D measurement of semiconductor components, SPIE Interferometry: Techniques and Analysis, San Diego, United States, pages 12-23, SPIE (Eds.), Eds G. Brown, O.Y. Kwon, M. Kujawinska & G.T. Reid, Volume 1755, février 1993, doi:10.1117/12.140772
Research team : IPP
Powered by Papr@Inproceedings{4-MF93,
author = {Montgomery, P. and Fillard, J.},
title = {Peak fringe scanning microscopy (PFSM): submicron 3D measurement of semiconductor components},
booktitle = {SPIE Interferometry: Techniques and Analysis},
volume = {1755},
pages = {12-23},
month = {Feb},
year = {1993},
editor = {SPIE},
publisher = {Eds G. Brown, O.Y. Kwon, M. Kujawinska & G.T. Reid},
organization = {SPIE},
doi = {10.1117/12.140772},
x-international-audience = {Yes},
x-language = {EN},
url = {http://publis.icube.unistra.fr/4-MF93}
}