A. Benatmane , P. Montgomery , É. Fogarassy
Electronic Imaging 2003 , Volume 5004 , page 52--58 - 2003
International conference with proceedings
Phase stepping microscopy for rapid control of laser crystallization of Si for flat panel display applications, Electronic Imaging 2003, Santa Clara, United States, pages 52--58, edited by A.T. Voutsas (Eds.), SPIE, Proceedings of the Society of Photo-optical Instrumentation Engineers, Volume 5004, janvier 2003. ISBN 0-8194-4804-4, http://spie.org/x648.xml?product_id=479598
Research team : IPP
Powered by Papr@Inproceedings{4-BMF03,
author = {Benatmane, A. and Montgomery, P. and Fogarassy, É.},
title = {Phase stepping microscopy for rapid control of laser crystallization of Si for flat panel display applications},
booktitle = {Electronic Imaging 2003},
series = {Proceedings of the Society of Photo-optical Instrumentation Engineers},
volume = {5004},
pages = {52--58},
month = {Jan},
year = {2003},
editor = {edited by A.T. Voutsas},
publisher = {SPIE},
organization = {SPIE},
note = {ISBN 0-8194-4804-4, http://spie.org/x648.xml?product_id=479598},
x-international-audience = {Yes},
x-language = {EN},
url = {http://publis.icube.unistra.fr/4-BMF03}
}