Microsphere-assisted phase-shifting profilometry

Webpage : https://doi.org/10.1364/AO.56.007249

In the present work, we have investigated the combination of super-resolution microsphere-assisted 2D imaging technique with low-coherence phase-shifting interference microscopy. The imaging performance of this technique is studied by numerical simulation in terms of the magnification and the lateral resolution as a function of the geometrical and optical parameters. The results of simulations are compared with the experimental measurements of reference gratings using a Linnik interference configuration. Additional measurements are also shown on nanostructures. An improvement by a factor of 4.7 in the lateral resolution is demonstrated in air, thus giving a more isotropic nanometric accuracy for full-field surface profilometry in the far field.

S. Perrin , A. Leong-Hoi , S. Lecler , P. Pfeiffer , I. Kassamakov , A. Nolvi , E. Haeggström , P. Montgomery

Applied Optics , Volume 56 , Number 25 , page 7249-7255 - 2017

@Article{2-PLLP17,
 author = {Perrin, S. and Leong-Hoi, A. and Lecler, S. and Pfeiffer, P. and Kassamakov, I. and Nolvi, A. and Haeggstr\"om, E. and Montgomery, P.},
 title = {Microsphere-assisted phase-shifting profilometry},
 journal = {Applied Optics},
 number = {25},
 volume = {56},
 pages = {7249-7255},
 month = {Jun},
 year = {2017},
 doi = {10.1364/AO.56.007249},
 x-international-audience = {Yes},
 x-language = {EN},
 url = {http://publis.icube.unistra.fr/2-PLLP17}
}