P. Montgomery , D. Montaner , O. Manzardo , M. Flury , H-P. Herzig
Thin Solid Films , Volume 450 , page 79--83 - 2004
International journal
The metrology of a miniature FT spectrometer MOEMS device using white light scanning interference microscopy, Thin Solid Films, Elsevier ( SNIP : 0.72, SJR : 0.454 ), pages 79--83, Volume 450, Strasbourg (France),, 2004
Research team : IPP
Powered by Papr@Article{2-MMMF04,
author = {Montgomery, P. and Montaner, D. and Manzardo, O. and Flury, M. and Herzig, H-P.},
title = {The metrology of a miniature FT spectrometer MOEMS device using white light scanning interference microscopy},
journal = {Thin Solid Films},
volume = {450},
pages = {79--83},
year = {2004},
organization = {European Material Research Society (E-MRS) Spring Conference, Symposium on Optical and X-Ray Metrology for Advanced Device Materials Characterization,},
address = {Strasbourg (France),},
x-international-audience = {Yes},
x-language = {EN},
url = {http://publis.icube.unistra.fr/2-MMMF04}
}